Authors
Chandan Samanta, Nishta Arora, Srinivasan Raghavan, AK Naik
Publication date
2019
Journal
Nanoscale
Volume
11
Issue
17
Pages
8394-8401
Publisher
Royal Society of Chemistry
Description
We demonstrate all electrical measurements on NEMS devices fabricated using CVD grown monolayer MoS2. The as-grown monolayer film of MoS2 on top of the SiO2/Si wafer is processed to fabricate arrays and individual NEMS devices without the complex pick and transfer techniques associated with graphene. The electromechanical properties of the devices are on par with those fabricated using the exfoliation method. The frequency response of these devices is then used as a probe to estimate the linear thermal expansion coefficient of the material and evaluate the effect of strain on the effective Duffing nonlinearity in the devices.
Total citations
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