Authors
Nishta Arora, Parmeshwar Prasad, Akshay Naik
Publication date
2022/1/9
Conference
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Pages
495-498
Publisher
IEEE
Description
In this work, we provide experimental evidence to support the theoretical understanding of the microscopic origin of nonlinear damping in molybdenum disulfide (MoS2) resonator mediated through intermodal coupling. In atomically thin two-dimensional membranes, the effect of intermodal coupling on energy dissipation cannot be ignored since the vibrational modes are intrinsically coupled through membrane strain. The origin of nonlinear damping in Mos2 resonator due to intermodal coupling (internal resonance) is observed in the linear regime with varying gate bias. We further confirm our hypothesis through observation of fundamental mode peak splitting arising due to strong intermodal coupling at higher actuation force (≈ 0.45nN).
Scholar articles
N Arora, P Prasad, A Naik - 2022 IEEE 35th International Conference on Micro …, 2022