Authors
Nishta Arora, Priyanka Singh, Randhir Kumar, Rudra Pratap, Akshay Naik
Publication date
2024/1/5
Journal
ACS Applied Electronic Materials
Volume
6
Issue
1
Pages
155-162
Publisher
American Chemical Society
Description
Nonlinearities play a critical role in the dynamics of mechanical resonators, enhancing sensitivity and enabling signal manipulation. Understanding the parameters affecting nonlinearities is crucial for developing strategies to counteract their effects or manipulate them for improved device performance. This study investigates the impact of fabrication-induced curvature on the dynamics of zinc-oxide-based piezoelectric micromachined ultrasonic transducers (PMUTs). Our experiments reveal that these devices exhibit hardening, softening, and mixed nonlinear responses with varying initial static displacements. Notably, PMUTs with an almost flat initial static displacement exhibit hardening nonlinearity, while those with a curved initial static displacement show softening nonlinearity. An exotic mixed nonlinear response is observed for intermediate static displacement. We attribute the observed nonlinear response to the …
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Scholar articles
N Arora, P Singh, R Kumar, R Pratap, A Naik - ACS Applied Electronic Materials, 2024