Authors
F Molina-Lopez, A Vásquez Quintero, G Mattana, D Briand, NF De Rooij
Publication date
2013/1/9
Journal
Journal of Micromechanics and Microengineering
Volume
23
Issue
2
Pages
025012
Publisher
IOP Publishing
Description
This work presents the simultaneous fabrication of ambient relative humidity (RH) and temperature sensors arrays, inkjet-printed on flexible substrates and subsequently encapsulated at foil level. These sensors are based on planar interdigitated capacitors with an inkjet-printed sensing layer and meander-shaped resistors. Their combination allows the compensation of the RH signals variations at different temperatures. The whole fabrication of the system is carried out at foil level and involves the utilization of additive methods such as inkjet-printing and electrodeposition. Electrodeposition of the printed lines resulted in an improvement of the thermoresistors. The sensors have been characterized and their performances analyzed. The encapsulation layer does not modify the performances of the sensors in terms of sensitivity or response time. This work demonstrates the potential of inkjet-printing in the large-area …
Scholar articles
F Molina-Lopez, AV Quintero, G Mattana, D Briand… - Journal of Micromechanics and Microengineering, 2013