Authors
Albertas Žukauskas, Mangirdas Malinauskas, Arūnas Kadys, Gediminas Gervinskas, Gediminas Seniutinas, Sasikaran Kandasamy, Saulius Juodkazis
Publication date
2013/3/25
Journal
Optics express
Volume
21
Issue
6
Pages
6901-6909
Publisher
Optica Publishing Group
Description
We demonstrate that black silicon (b-Si) made by dry plasma etching is a promising substrate for laser three-dimensional (3D) micro/nano-polymerization. High aspect ratio Si-needles, working as sacrificial support structures, have flexibility required to relax interface stresses between substrate and the polymerized micro-/nano- objects. Surface of b-Si can be made electrically conductive by metal deposition and, at the same time, can preserve low optical reflectivity beneficial for polymerization by direct laser writing. 3D laser polymerization usually performed at the irradiation conditions close to the dielectric breakdown is possible on non-reflective and not metallic surfaces. Here we show that low reflectivity and high metallic conductivity are not counter- exclusive properties for laser polymerization. Electrical conductivity of substrate and its permeability in liquids are promising for bio- and electroplating applications.
Total citations
201320142015201620172018201920202021202220232024101813939394751
Scholar articles
A Žukauskas, M Malinauskas, A Kadys, G Gervinskas… - Optics express, 2013