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This thesis work describes the development of a new technology for mass spectrometry using nanoelectromechanical systems (NEMS-MS). Mass spectrometry is a technique used to identify molecules through mass measurement. Nanoelectromechanical systems (NEMS) feature low cost, scalable on-chip compatibility, and are highly sensitivity to the mass of accreted species. Using NEMS devices, we perform NEMS-MS where the inertial mass of individual molecules is directly measured. This contrasts with traditional MS techniques utilizing electromagnetic fields to measure the average mass-to-charge ratio of many molecules.