Authors
Marco Gadola, Andrea Buffoli, Marc Sansa, Audrey Berthelot, Philippe Robert, Giacomo Langfelder
Publication date
2021/6/18
Journal
Journal of Microelectromechanical Systems
Volume
30
Issue
4
Pages
513-520
Publisher
IEEE
Description
The research reports the design and experimental results of novel gyroscopes based on nano-resistive sensing, capable to meet navigation grade specifications within a sensor footprint of 1.3 mm 2 and a total silicon structural volume of 0.026 mm 3 only. A significant increase of the scale-factor is obtained through a combination of (i) optimization of the Coriolis force transduction into a stress on the resistive gauges, (ii) increase of the drive motion amplitude and (iii) increase of the current through the sensing gauges. Combined with low-pressure eutectic packaging, this enables approaching the thermomechanical noise limits of the sensor at about 0.004 ° /√ hr. At the same time, electronics is developed with minimum demodulation phase errors, thus enabling optimized closed-loop quadrature compensation and minimization of drift effects. Thanks to the inherent rejection of parasitic couplings and associated …
Total citations
20212022202320245121611
Scholar articles
M Gadola, A Buffoli, M Sansa, A Berthelot, P Robert… - Journal of Microelectromechanical Systems, 2021