Authors
Théo Miani, Thierry Verdot, Audrey Berthelot, Federico Maspero, Alexandra Koumela, Philippe Robert, Giacomo Langfelder, Julien Arcamone, Marc Sansa
Publication date
2021/1/25
Conference
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
192-195
Publisher
IEEE
Description
We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies. These sensors are fabricated with a 200 mm MEMS technology.
Total citations
Scholar articles
T Miani, T Verdot, A Berthelot, F Maspero, A Koumela… - 2021 IEEE 34th International Conference on Micro …, 2021