Authors
J Verd, M Sansa, A Uranga, F Perez-Murano, J Segura, N Barniol
Publication date
2011
Journal
Lab on a Chip
Volume
11
Issue
16
Pages
2670-2672
Publisher
Royal Society of Chemistry
Description
Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
Scholar articles
J Verd, M Sansa, A Uranga, F Perez-Murano, J Segura… - Lab on a Chip, 2011