Authors
J Llobet, M Sansa, M Lorenzoni, X Borrisé, A San Paulo, F Pérez-Murano
Publication date
2015/8/17
Journal
Applied Physics Letters
Volume
107
Issue
7
Pages
073104
Publisher
AIP Publishing
Description
The effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations.
Resonating nanomechanical structures are attractive building blocks for the realization of high performance sensors and integrated oscillators. 1 For example, a double clamped nanometric beam (DCB)(a silicon nanowire or a carbon nanotube) presents very large resonance frequency and extremely low mass, which are both highly convenient to detect minuscule quantities of mass. 2, 3 Also, DCB …
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J Llobet, M Sansa, M Lorenzoni, X Borrisé… - Applied Physics Letters, 2015