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Nanoscale solute segregation to or near lattice defects is a coupled diffusion and trapping phenomenon that occurs in superalloys at high temperatures during service. Understanding the mechanisms underpinning this crucial process will open pathways to tuning the alloy composition for improving the high-temperature performance and lifetime. Here, we introduce an approach combining atom probe tomography with high-end scanning electron microscopy techniques, in transmission and backscattering modes, to enable direct investigation of solute segregation to defects generated during high-temperature deformation such as dislocations in a heat-treated Ni-based superalloy and planar faults in a CoNi-based superalloy. Three protocols were elaborated to capture the complete structural and compositional nature of the targeted defect in the alloy.