Authors
Julia D Cushen, Issei Otsuka, Christopher M Bates, Sami Halila, Sébastien Fort, Cyrille Rochas, Jeffrey A Easley, Erica L Rausch, Anthony Thio, Redouane Borsali, C Grant Willson, Christopher J Ellison
Publication date
2012/4/24
Journal
ACS nano
Volume
6
Issue
4
Pages
3424-3433
Publisher
American Chemical Society
Description
Block copolymers demonstrate potential for use in next-generation lithography due to their ability to self-assemble into well-ordered periodic arrays on the 3–100 nm length scale. The successful lithographic application of block copolymers relies on three critical conditions being met: high Flory–Huggins interaction parameters (χ), which enable formation of <10 nm features, etch selectivity between blocks for facile pattern transfer, and thin film self-assembly control. The present paper describes the synthesis and self-assembly of block copolymers composed of naturally derived oligosaccharides coupled to a silicon-containing polystyrene derivative synthesized by activators regenerated by electron transfer atom transfer radical polymerization. The block copolymers have a large χ and a low degree of polymerization (N) enabling formation of 5 nm feature diameters, incorporate silicon in one block for oxygen reactive …
Total citations
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