Authors
Anxin Luo, Yixin Xu, Siyan Chen, Hanning Dong, Yulong Zhang, Fei Wang
Publication date
2017/8/7
Conference
2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
Pages
134-137
Publisher
IEEE
Description
This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm 2 . With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s 2 . The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.
Total citations
2020202120222023112
Scholar articles
A Luo, Y Xu, S Chen, H Dong, Y Zhang, F Wang - 2017 IEEE International Conference on Manipulation …, 2017