Authors
Émile Lalande, Aaron Davenport, Lory Marchand, Ashot Markosyan, Daniel Martinez, Annalisa Paolone, Michael Rezac, Marco Bazzan, Martin Chicoine, Julien L Colaux, Matthieu Coulon, Martin M Fejer, Alexandre W Lussier, Ettore Majorana, Ludvik Martinu, Carmen Menoni, Christophe Michel, Fulvio Ricci, François Schiettekatte, Nikita Shcheblanov, Joshua R Smith, Julien Teillon, Guy Terwagne, Gabriele Vajente
Publication date
2024/5/9
Journal
Classical and Quantum Gravity
Volume
41
Issue
11
Pages
115013
Publisher
IOP Publishing
Description
Blistering is a phenomenon sometimes observed in sputtered-deposited thin films but seldom investigated in detail. Here, we consider the case of titania-doped germania (TGO)/silica multilayers deposited by ion beam sputtering. TGO is a candidate as high refractive index material in the Bragg mirrors for the next iteration of gravitational waves detectors. It needs to be annealed at 600∘ C for 100 h in order to reach the desired relaxation state. However under some growth conditions, in 52-layer TGO/silica stacks, blistering occurs upon annealing at a temperature near 500∘ C, which corresponds to the temperature where Ar desorbs from TGO. In order to better understand the blistering phenomenon, we measure the Ar transport in single layers of TGO and silica. In the case of
Scholar articles
É Lalande, A Davenport, L Marchand, A Markosyan… - Classical and Quantum Gravity, 2024