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In this study, the problem of estimating surface acoustic wave (SAW) velocity and coupling coefficient for multi-layered piezo-substrates is investigated in Aluminum Nitride/Silicon Dioxide/Silicon (AlN/SiO ₂ /Si) using energy dissipation method. Assuming SAW energy lying within 10 times of wavelength (λ ₀ ) from the surface with ~ 90% energy lying within 1 λ ₀ , layers of different materials can cause a significant variations in SAW velocity. The assumption stated above, herein called as Energy Method, is employed to estimate SAW velocity in layered piezo-substrates. SAW device is fabricated using conventional lithography process and AlN is deposited using non-conformal physical vapor deposition (PVD) technique. The transfer characteristics of the SAW device are then measured using vector network analyzer (VNA) and thus operating central frequency f _o is obtained to use in computation of SAW velocity …