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Closed-form expressions for the stiffness and the damping coefficients of a squeeze film are derived for MEMS devices with perforated back plates. Two kinds of perforation configurations are considered—staggered and matrix or non-staggered configuration. The analytical solutions are motivated from the observation of repetitive pressure patterns obtained from numerical (FEM) solutions of the compressible Reynolds equation for the two configurations using ANSYS. A single pressure pattern is isolated and further subdivided into circular pressure cells. Circular geometry is used based on observed symmetry. Using suitable boundary conditions, the Reynolds equation is analytically solved over the pressure cells. The complex pressure obtained is used to identify the stiffness and damping offered by the pressure cells. The stiffness and damping forces due to pressure cells within a pattern are added up separately …