Authors
Suhas Mohite, Nishad Patil, Rudra Pratap
Publication date
2006/4/1
Journal
Journal of Physics: Conference Series
Volume
34
Issue
1
Pages
757
Publisher
IOP Publishing
Description
Among various MEMS sensors, a rate gyroscope is one of the most complex sensors from the design point of view. The gyro normally consists of a proof mass suspended by an elaborate assembly of beams that allow the system to vibrate in two transverse modes. The structure is normally analysed and designed using commercial FEM packages such as ANSYS or MEMS specific commercial tools such as Coventor or Intellisuite. In either case, the complexity in analysis rises manyfolds when one considers the etch hole topography and the associated. uid flow calculation for damping. In most cases, the FEM analysis becomes prohibitive and one resorts to equivalent electrical circuit simulations using tools like SABER in Coventor. Here, we present a simpli. ed lumped parameter model of the tuning fork gyro and show how easily it can be implemented using a generic tool like SIMULINK. The results obtained are …
Total citations
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Scholar articles
S Mohite, N Patil, R Pratap - Journal of Physics: Conference Series, 2006