Authors
Sang-Min Park, Xiaogan Liang, Bruce D Harteneck, Teresa E Pick, Nobuya Hiroshiba, Ying Wu, Brett A Helms, Deirdre L Olynick
Publication date
2011/11/22
Journal
ACS nano
Volume
5
Issue
11
Pages
8523-8531
Publisher
American Chemical Society
Description
Directed self-assembly (DSA) of block copolymers (BCPs), either by selective wetting of surface chemical prepatterns or by graphoepitaxial alignment with surface topography, has ushered in a new era for high-resolution nanopatterning. These pioneering approaches, while effective, require expensive and time-consuming lithographic patterning of each substrate to direct the assembly. To overcome this shortcoming, nanoimprint moldsattainable via low-cost optical lithographywere investigated for their potential to be reusable and efficiently template the assembly of block copolymers (BCPs) while under complete confinement. Nanoimprint directed self-assembly conveniently avoids repetitive and expensive chemical or topographical prepatterning of substrates. To demonstrate this technique for high-resolution nanofabrication, we aligned sub-10 nm resolution nanopatterns using a cylinder-forming, organic …
Total citations
201120122013201420152016201720182019202020212022202320241122024271418106118755
Scholar articles