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Samarium-doped ceria (SDC) thin films were prepared from Sm(DPM)₃ (DPM=2,2,6,6-tetramethyl-3,5-heptanedionato) and Ce(DPM)₄ using the aerosol-assisted metal–organic chemical vapor deposition method. α-Al₂O₃ and NiO-YSZ (YSZ=Y₂O₃-stabilized ZrO₂) disks were chosen as substrates in order to investigate the difference in the growth process on the two substrates. Single cubic structure could be obtained on either α-Al₂O₃ or NiO-YSZ substrates at deposition temperatures above 450 °C; the similar structure between YSZ and SDC results in matching growth compared with the deposition on α-Al₂O₃ substrate. A typical columnar structure could be obtained at 650 °C on α-Al₂O₃ substrate and a more uniform surface was produced on NiO-YSZ substrate at 500 °C. The composition of SDC film deposited at 450 °C is close to that of precursor solution (Sm:Ce=1:4), higher or lower deposition temperature …