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Multifunctional P-doped TiO₂ thin films were synthesized by atmospheric pressure chemical vapor deposition (APCVD). This is the first example of P-doped TiO₂ films with both P⁵⁺ and P^3– states, with the relative proportion being determined by synthesis conditions. This technique to control the oxidation state of the impurities presents a new approach to achieve films with both self-cleaning and TCO properties. The origin of electrical conductivity in these materials was correlated to the incorporation of P⁵⁺ species, as suggested by Hall Effect probe measurements. The photocatalytic performance of the films was investigated using the model organic pollutant, stearic acid, with films containing predominately P^3– states found to be vastly inferior photocatalysts compared to undoped TiO₂ films. Transient absorption spectroscopy studies also showed that charge carrier concentrations increased by several orders of …