Authors
A Béché, JL Rouvière, JP Barnes, D Cooper
Publication date
2011/2/1
Journal
Ultramicroscopy
Volume
111
Issue
3
Pages
227-238
Publisher
North-Holland
Description
Dark field electron holography is a new TEM-based technique for measuring strain with nanometer scale resolution. Here we present the procedure to align a transmission electron microscope and obtain dark field holograms as well as the theoretical background necessary to reconstruct strain maps from holograms. A series of experimental parameters such as biprism voltage, sample thickness, exposure time, tilt angle and choice of diffracted beam are then investigated on a silicon-germanium layer epitaxially embedded in a silicon matrix in order to obtain optimal dark field holograms over a large field of view with good spatial resolution and strain sensitivity.
Total citations
201020112012201320142015201620172018201920202021202220232024164573876427345
Scholar articles
A Béché, JL Rouvière, JP Barnes, D Cooper - Ultramicroscopy, 2011