Authors
Jean-Luc Rouviere, Armand Béché, Yannick Martin, Thibaud Denneulin, David Cooper
Publication date
2013/12/9
Journal
Applied Physics Letters
Volume
103
Issue
24
Publisher
AIP Publishing
Description
NanoBeam Electron Diffraction is a simple and efficient technique to measure strain in nanostructures. Here, we show that improved results can be obtained by precessing the electron beam while maintaining a few nanometer probe size, ie, by doing Nanobeam Precession Electron Diffraction (N-PED). The precession of the beam makes the diffraction spots more uniform and numerous, making N-PED more robust and precise. In N-PED, smaller probe size and better precision are achieved by having diffraction disks instead of diffraction dots. Precision in the strain measurement better than 2× 10− 4 is obtained with a probe size approaching 1 nm in diameter.
Scholar articles
JL Rouviere, A Béché, Y Martin, T Denneulin… - Applied Physics Letters, 2013