Authors
M Hermouet, M Sansa, L Banniard, A Fafin, M Gely, PE Allain, E Gil Santos, I Favero, T Alava, G Jourdan, S Hentz
Publication date
2018/2/19
Conference
Microfluidics, BioMEMS, and Medical Microsystems XVI
Volume
10491
Pages
48-51
Publisher
SPIE
Description
Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. In this study, we demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for sensing applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors, yielding high displacement sensitivity and strong coupling between optical WGMs and in-plane mechanical Radial Breathing Modes (RBM). Such high-Q microdisks with mechanical resonance frequencies in the 102 MHz range were fabricated on 200 mm wafers with Variable Shape Electron Beam lithography. Benefiting from ultrasensitive readout, their Brownian motion could be resolved with good Signal-to-Noise ratio at ambient pressure, as …
Total citations
20202021202221
Scholar articles
M Hermouet, M Sansa, L Banniard, A Fafin, M Gely… - Microfluidics, BioMEMS, and Medical Microsystems XVI, 2018