Authors
Pavlo Fesenko, Valentin Flauraud, Shenqi Xie, Enpu Kang, Takafumi Uemura, Jürgen Brugger, Jan Genoe, Paul Heremans, Cédric Rolin
Publication date
2017/7/19
Journal
ACS applied materials & interfaces
Volume
9
Issue
28
Pages
23314-23318
Publisher
American Chemical Society
Description
To grow small molecule semiconductor thin films with domain size larger than modern-day device sizes, we evaporate the material through a dense array of small apertures, called a stencil nanosieve. The aperture size of 0.5 μm results in low nucleation density, whereas the aperture-to-aperture distance of 0.5 μm provides sufficient crosstalk between neighboring apertures through the diffusion of adsorbed molecules. By integrating the nanosieve in the channel area of a thin-film transistor mask, we show a route for patterning both the organic semiconductor and the metal contacts of thin-film transistors using one mask only and without mask realignment.
Total citations
2021202222