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Recently, techniques known as' micro-origami'or'strain architecture'have emerged for the fabrication of out-of-plane micro-and nanostructures by relaxation of a pair of strain-mismatched thin films. Applications of such structures include optical reflectors, actuators and micropositioners. We illustrate how control of the folding order can generate complex three-dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multi-axis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by XeF 2 dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process.