Authors
Hoang-Phuong Phan, Toan Dinh, Takahiro Kozeki, Tuan-Khoa Nguyen, Afzaal Qamar, Takahiro Namazu, Nam-Trung Nguyen, Dzung Viet Dao
Publication date
2016/6/9
Journal
IEEE Electron Device Letters
Volume
37
Issue
8
Pages
1029-1032
Publisher
IEEE
Description
This letter reports on the piezoresistive effect of top-down fabricated 3C-SiC nanowires (NWs). Focused ion beam was utilized to create p-type 3C-SiC NWs from a 3C-SiC thin film with a carrier concentration of 5 × 10 18 cm -3 epitaxially grown on a Si substrate. The as-fabricated NWs were then subjected to tensile strains varying from 0 to 280 με. Experimental data showed that the p-type 3C-SiC NWs possess a large gauge factor of 35, which is at least one order of magnitude larger than that of other hard materials, such as carbon nanotubes and graphene. This large gauge factor and the linear relationship between the relative resistance change and the applied strain in the SiC NWs indicate their potential for nanoelectromechanical systems sensing applications.
Total citations
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Scholar articles
HP Phan, T Dinh, T Kozeki, TK Nguyen, A Qamar… - IEEE Electron Device Letters, 2016