Authors
Tuan-Khoa Nguyen, Hoang-Phuong Phan, Toan Dinh, Jisheng Han, Sima Dimitrijev, Philip Tanner, Abu Riduan Md Foisal, Yong Zhu, Nam-Trung Nguyen, Dzung Viet Dao
Publication date
2017/5/2
Journal
IEEE Electron Device Letters
Volume
38
Issue
7
Pages
955-958
Publisher
IEEE
Description
This letter presents for the first time the piezoresistive effect in p-type 4H-SiC. Longitudinal and transverse p-type 4H-SiC piezoresistors with a doping concentration of 10 18 cm -3 were fabricated along [1100] directions. Ni/Al electrodes annealed at 1000°C showed a good ohmic contact, and then, the longitudinal and transverse gauge factors were found to be as high as 31.5 and -27.3, respectively. The large gauge factors, attributed to the change of valance energy bands upon application of mechanical strain, and the linear relationship between the resistance change versus induced strain demonstrate the potential of p-type 4H-SiC for mechanical sensing applications.
Total citations
20172018201920202021202220232024312675736
Scholar articles
TK Nguyen, HP Phan, T Dinh, J Han, S Dimitrijev… - IEEE Electron Device Letters, 2017