Authors
Hoang-Phuong Phan, Yishan Zhong, Tuan-Khoa Nguyen, Yoonseok Park, Toan Dinh, Enming Song, Raja Kumar Vadivelu, Mostafa Kamal Masud, Jinghua Li, Muhammad JA Shiddiky, Dzung Dao, Yusuke Yamauchi, John A Rogers, Nam-Trung Nguyen
Publication date
2019/8/21
Journal
ACS nano
Volume
13
Issue
10
Pages
11572-11581
Publisher
American Chemical Society
Description
Implantable electronics are of great interest owing to their capability for real-time and continuous recording of cellular–electrical activity. Nevertheless, as such systems involve direct interfaces with surrounding biofluidic environments, maintaining their long-term sustainable operation, without leakage currents or corrosion, is a daunting challenge. Herein, we present a thin, flexible semiconducting material system that offers attractive attributes in this context. The material consists of crystalline cubic silicon carbide nanomembranes grown on silicon wafers, released and then physically transferred to a final device substrate (e.g., polyimide). The experimental results demonstrate that SiC nanomembranes with thicknesses of 230 nm do not experience the hydrolysis process (i.e., the etching rate is 0 nm/day at 96 °C in phosphate-buffered saline (PBS)). There is no observable water permeability for at least 60 days in …
Total citations
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