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For the final product to exhibit the required functions and costs, the machining accuracy and efficiency of the components must be improved. The shape accuracy of the machined parts depends on the motion accuracy of the machine tools for feeding and positioning the cutting tools and workpiece to the desired location. Generally, the motion accuracy of the machine tools is required to be less than 1/10th of the shape accuracy of a part. If a machining accuracy of 10 μm is required, a machine tool that cuts this part must have a motion accuracy of 1 μm or less. As the superiority or inferiority of the machine tool’s performance determines the production capacity and considerably affects the competitiveness of the products, each country positions the machine tool industry as a strategic key industry and makes intensive effort for advanced development [1]. The technology of machine tools has been deepened to attain highly accurate and efficient machining with high-precision and high-speed positioning. In the United States, the world's first numerical control (NC) machine tool was developed at the MIT Servo Mechanism Research Center in 1952 against the backdrop of an early mass consumption society. The advent of NC machine tools enabled the automation of machining, which was impossible to be achieved with analog/manual mechanical control, and then realized a mass production system by improving the machining efficiency and homogenization of machining accuracy. Positioning accuracy and speed of machine tools have been considerably improved through the continuous development of element technologies for feed drive systems …