Authors
Hui Yu, Oluwaseyi Balogun, Biao Li, Todd W Murray, Xin Zhang
Publication date
2004/8/9
Journal
Journal of micromechanics and microengineering
Volume
14
Issue
11
Pages
1576
Publisher
IOP Publishing
Description
In this paper, an innovative method to create embedded microchannels is presented. The presented technology is based on a direct-write technique using a scanning laser system to pattern a single layered SU-8. The enormous flexibility of the scanning laser system can be seen in two key features: the laser pulsing can be controlled spot-by-spot with variable exposure doses, and the laser intensity penetrating into samples can be adjusted by varying the laser focus level. The UV laser direct-write method greatly simplifies the fabrication processes. Moreover, it can be set up in a conventional manufacturing environment without the need for clean room facilities. The second part of this paper describes the underlying theory and method to determine Young's modulus of exposed SU-8 by using a laser acoustic microscopy system. The laser-based ultrasonic technique offers a non-contact, non-destructive means of …
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