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The use of microscale deterministic surface features has been investigated in many bearing and seal applications in recent research. This paper considers a class of surface textures that are comprised of periodic arrays of deterministic geometric shapes created using photolithography-based manufacturing processes. These features are unique in that they can be modeled as biplanar: the topography of the entire surface ideally lies on one of two parallel horizontal planes. A total of eight such surface textures are analyzed: three comprised of electroplated nickel cavities and five comprised of metal-impregnated polymer asperities. It is shown that for this class of surface textures, closed form solutions for perfectly-manufactured surfaces exist for eleven areal surface parameters—including amplitude (S_a, S_q, S_t and S_z), spatial (S_sk, S_ku and S_td) and functional (S_bi, S_ci and S_vi)—and these are derived and presented …