Authors
Julia Pignanelli, Kory Schlingman, Tricia Breen Carmichael, Simon Rondeau-Gagné, Mohammed Jalal Ahamed
Publication date
2019/1/1
Journal
Sensors and Actuators A: Physical
Volume
285
Pages
427-436
Publisher
Elsevier
Description
This paper focuses on the fabrication, characterization and comparative study of flexible pressure sensors, prepared from structured polydimethylsiloxane (PDMS) as flexible dielectric. In specific, four different patterning methods on PDMS dielectric surface were investigated including inverse mold, replica mold, photolithographic and non-shaped microstructures. The different patterned dielectrics were compared to gain insight onto the effect of flexible microstructure design on pressure sensitivity. A complete material characterization was performed using optical microscopy, scanning electron microscopy and tensile testing to evaluate the physical and electrical properties of the different microstructured PDMS dielectric. Static and dynamic pressure measurements were also performed to determine pressure sensitivities. Our results showed a strong dependence of the pressure sensitivity versus the microstructure …
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Scholar articles
J Pignanelli, K Schlingman, TB Carmichael… - Sensors and Actuators A: Physical, 2019