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Electron beam damage in electron microscopes is becoming more and more problematic in material research with the increasing demand of characterization of new beam sensitive material such as Li based compound used in batteries. Mainly two types of damage can be induced by the electron beam: radiolysis and knock-on damage. To avoid radiolysis damage caused by the inelastic interaction between a beam electron and a valence electron from one of the material’s atoms, the use of cryo-microscopy is becoming the conventional method for battery material characterization. By cooling the sample to cryogenic temperatures, radiolysis damage is reduced, however, it generally uses a high-energy electron beam (200-300 keV) which can be problematic for low Z materials. Through elastic interactions, a high-energy electron from the beam can transfer its energy to an atom’s nucleus and cause an atomic …