Authors
F Molina-Lopez, D Briand, NF De Rooij
Publication date
2013/12/1
Journal
Sensors and Actuators B: Chemical
Volume
189
Pages
89-96
Publisher
Elsevier
Description
In this work we present a novel strategy to fabricate printed comb electrodes devices with decreased size by the introduction of a thin dielectric layer between the two combs. The electrical insulation of the two polarities prevents short-cuts occurring because of printing defects. In this way, the yield of the process increases as well as its resolution by decreasing significantly the gap between the electrodes. An analytical model is proposed and evaluated, confirming the capability of the method to enhance the nominal capacitance value of comb electrodes capacitors with reduced area. The validation of the proposed method has been performed by fabricating transducers made of inkjet printed silver combed electrodes with a parylene-C dielectric interlayer. The whole process takes place at low temperature, being compatible with the utilized PET substrate. Finally, the potential of such devices for sensing applications …
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