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A process for treating a non-ferrous metal component, com prising placing the component into a process chamber at an elevated temperature, biasing the component to have a poten tial capable of attracting ions, introducing oxygen into the chamber at a pressure Such that a glow discharge comprising oxygen ions is generated, the process chamber additionally comprising a glow discharge ionization enhancing means, and activating the glow discharge ionization enhancing means thereby increasing charged species density of the glow discharge, the oxygen ions flowing towards the component and colliding the surface thereof at least some of which dif fuse into the component.