Authors
Michael J Vasile, Craig R Friedrich, Bharath Kikkeri, Rob McElhannon
Publication date
1996/10/1
Journal
Precision Engineering
Volume
19
Issue
2-3
Pages
180-186
Publisher
Elsevier
Description
Conventional milling techniques scaled to ultrasmall dimensions have been used to machine polymethyl methacrylate (PMMA) with micrometer-sized milling tools. The object of this work is to achieve machining of a common material over dimensions exceeding 1 mm while holding submicrometer tolerances and micrometer size features. Fabricating the milling tools themselves was also an object of the study. A tool geometry for nominal 25 micrometer diameter cutting tools was found that cuts PMMA with submicrometer tolerances over trench lengths of 2 mm. The tool shape is a simple planar facet cut by focused ion beam milling on ground and polished 25 micrometer diameter steel tool blanks. Pairs of trenches 24 micrometers wide, 26 micrometers deep, 2.3 mm long, with a 14 micrometer separation were milled under various machining conditions. The results indicate that the limits of the machining process in …
Total citations
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Scholar articles
MJ Vasile, CR Friedrich, B Kikkeri, R McElhannon - Precision Engineering, 1996