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Carbon nanotubes (CNTs) have found many potential applications but using CNTs as building blocks for nanoelectronics is still challenging. Various micro- and nanofabrication techniques including focused ion beam (FIB) are therefore being developed for combining CNTs into a nanodevice or to help assess the electrical properties of integrated CNTs. In this paper, multiwall carbon nanotubes (MWNTs) are assembled between a pair of gold (Au) electrodes by dielectrophoresis (DEP). Contact resistances of MWNT-Au and, in particular, MWNT-MWNT are measured with the help of making electrical connections between a MWNT and electrodes by FIB induced tungsten deposition. A method for resistance calculation is presented which considers the contact length of MWNTs. Under the conditions of this research, measured conducting resistances of MWNTs were from 1–10kΩ/μm and the contact resistance of …