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Three-dimensional (3D) integrated circuits and systems are expected to be present in electronic products in the short term. We consider specifically 3D multi-processor systems-on-chips (MPSoCs), realized by stacking silicon CMOS chips and interconnecting them by means of through-silicon vias (TSVs). Because of the high power density of devices and interconnect in the 3D stack, thermal issues pose critical challenges, such as hot-spot avoidance and thermal gradient reduction. Thermal management is achieved by a combination of active control of on-chip switching rates as well as active interlayer cooling with pressurized fluids. In this paper, we propose a novel online thermal management policy for high-performance 3D systems with liquid cooling. Our proposed controller uses a hierarchical approach with a global controller regulating the active cooling and local controllers (on each layer) performing dynamic …