Authors
Haiyue Zhu, Chee Khiang Pang, Tat Joo Teo
Publication date
2017/3/2
Journal
IEEE Transactions on Industrial Electronics
Volume
64
Issue
7
Pages
5553-5563
Publisher
IEEE
Description
This paper presents a novel parallel actuation dual-stage system that delivers nanometric positioning over a large displacement. Unlike those traditional dual-stage designs, the translator of fine actuator in the proposed design is mechanically connected to the coarse translator via the flexure mechanism, while the actuation coils of both the coarse and fine actuators lay underneath the translators in parallel. The merits of the proposed parallel actuation dual-stage design are mainly twofold. First, both the coarse and fine actuators utilize the moving-magnet configuration, hence the translators do not need to carry any cables for power supply. Second, the coarse motion can exhibit better dynamics and energy efficiency due to the minimized moving size and weight. In this work, an analytical current-force model is established for the coarse actuator considering higher order harmonic magnetic field, and based on the …
Total citations
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Scholar articles
H Zhu, CK Pang, TJ Teo - IEEE Transactions on Industrial Electronics, 2017