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Due to the unattended nature of WSN (Wireless Sensor Network) deployment, each sensor can be subject to physical capture, cloning and unauthorized device alteration. In this paper, we use the embedded SRAM, often available on a wireless sensor node, for secure data (cryptographic keys, IDs) generation which is more resistant to physical attacks. We evaluate the physical phenomenon that the initial state of a 6T-SRAM cell is highly dependent on the process variations, which enables us to use the standard SRAM circuit, as a Physical Unclonable Function (PUF). Important requirements to serve as a PUF are that the start-up values of an SRAM circuit are uniquely determined, unpredictable and similar each time the circuit is turned on. We present the evaluation results of the internal SRAM memories of low power ICs as PUFs and the statistical analysis of the results. The experimental results prove that the low …