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A non-aqueous approach was developed to synthesize iron phosphate cathode materials by the atomic layer deposition (ALD) technique. Deposition of iron phosphate thin films was achieved on nitrogen-doped carbon nanotubes (NCNTs) by combining ALD subcycles of Fe₂O₃ (ferrocene-ozone) and PO_x (trimethyl phosphate-water) at 200 – 350 °C. The thickness of iron phosphate thin films depends linearly on the ALD cycle, indicating their self-limiting growth behavior. The growth per cycle of iron phosphate thin films was determined to be ∼ 0.2, 0.4, 0.6, and 0.5 Å, at 200, 250, 300, and 350 °C, respectively. Characterization by SEM, TEM, and HRTEM techniques revealed uniform and conformal coating of amorphous iron phosphates on the surface of NCNTs. XANES analysis confirmed Fesingle bondOsingle bondP bonding in the iron phosphates prepared by ALD. Furthermore, electrochemical measurement …