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The 2010 March 4, Jia-Shian (M_w 6.3) earthquake in SW Taiwan caused moderate damage and no surface rupture was observed, reflecting a deep source that is relatively rare in western Taiwan. We develop finite-source models using a combination of seismic waveform (strong motion and broadband), Global Positioning System (GPS) and synthetic aperture radar interferometry (InSAR) data to understand the rupture process and slip distribution of this event. The rupture centroid source depth is 19 km based on a series of moment tensor solution tests with improved 1-D Green's functions. The preferred fault model strikes 322° and dips 27° to the NE and the mainshock is a thrust event with a small left-lateral component. The finite-source model shows a primary slip asperity that is about 20 km in diameter at a depth range from 22 to 13 km, with peak slip of 42.5 cm, a total scalar seismic moment of 3.25 × 10 …