Authors
Ph Robert, V Nguyen, S Hentz, L Duraffourg, G Jourdan, J Arcamone, S Harrisson
Publication date
2009/10/25
Conference
SENSORS, 2009 IEEE
Pages
963-966
Publisher
IEEE
Description
We are presenting a novel approach for very low cost 3D inertial sensor. The idea consists in using on same device MEMS and NEMS technologies. The MEMS part is used for the mass to keep sufficient inertial force, and the NEMS is used as a very sensitive sub-¿m suspended stress gauge. This way enables the detection of in-plane and out-of-plane acceleration on a same device and with differential detection means (to reduce thermal sensitivity). Technological realization and first characterizations of the accelerometer have been achieved and are detailed in this paper. Accelerometer area is around 0.1 mm 2 per axis, which means at least 3 to 5 times smaller than conventional MEMS accelerometers. Moreover, the performances are compatible with typical consumer market accelerometer specifications.
Total citations
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Scholar articles
P Robert, V Nguyen, S Hentz, L Duraffourg, G Jourdan… - SENSORS, 2009 IEEE, 2009