Authors
J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, R Barattin, M Matheron, F Ricoul, T Bordy, H Blanc, J Ruellan, D Mercier, N Pereira-Rodrigues, G Costa, V Agache, S Hentz, Jean-Christophe P Gabriel, F Baleras, C Marcoux, T Ernst, L Duraffourg, E Colinet, EB Myers, ML Roukes, P Andreucci, E Ollier, P Puget
Publication date
2011/12/5
Conference
IEDM-2011 IEEE International Electron Devices Meeting
Pages
669-672
Publisher
IEEE
Description
This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.
Scholar articles
J Arcamone, A Niel, V Gouttenoire, M Petitjean… - IEDM-2011 IEEE International Electron Devices …, 2011