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The avalanche multiplication and excess noise characteristics of 4H-SiC avalanche photodiodes with i-region widths of 0.105 and 0.285 /spl mu/m have been investigated using 230-365-nm light, while the responsivities of the photodiodes at unity gain were examined for wavelengths up to 375 nm. Peak unity gain responsivities of more than 130 mA/W at 265 nm, equivalent to quantum efficiencies of more than 60%, were obtained for both structures. The measured avalanche characteristics show that /spl beta/>/spl alpha/ and that the /spl beta///spl alpha/ ratio remains large even in thin 4H-SiC avalanche regions. Very low excess noise, corresponding to k/sub eff/<0.15 in the local noise model, where k/sub eff/=/spl alpha///spl beta/(/spl beta///spl alpha/) for hole (electron) injection, was measured with 365-nm light in both structures. Modeling the experimental results using a simple quantum efficiency model and a …