Authors
Christopher M Bates, Michael J Maher, Dustin W Janes, Christopher J Ellison, C Grant Willson
Publication date
2014/1/14
Journal
Macromolecules
Volume
47
Issue
1
Pages
2-12
Publisher
American Chemical Society
Description
This Perspective addresses the current state of block copolymer lithography and identifies key challenges and opportunities within the field. Significant strides in experimental and theoretical thin film research have nucleated the transition of block copolymers “from lab to fab”, but outstanding questions remain about the optimal materials, processes, and analytical techniques for first-generation devices and beyond. Particular attention herein is focused on advances and issues related to thermal annealing. Block copolymers are poised to change the traditional lithographic resolution enhancement paradigm from “top-down” to “bottom-up”.
Total citations
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Scholar articles
CM Bates, MJ Maher, DW Janes, CJ Ellison… - Macromolecules, 2014