Inventors
Hiroshi Ito, Carlton G Willson, Jean MJ Frechet
Publication date
1985/1/1
Patent office
US
Patent number
4491628
Application number
06410201
Description
Resists sensitive to UV, electron beam and X-ray radiation with positive or negative tone upon proper choice of a developer are formulated from a polymer having recurrent pendant groups such as tert-butyl ester or tert-butyl carbonates that undergo efficient acidolysis with concomitant changes in polarity (solubility) together with a photoinitiator which generates acid upon radiolysis. A sensitizer component that alters wavelength sensitivity may also be added.
Total citations
Scholar articles
H Ito, CG Willson, JMJ Frechet - US Patent 4,491,628, 1985