Authors
Achint Jain, Áron Szabó, Markus Parzefall, Eric Bonvin, Takashi Taniguchi, Kenji Watanabe, Palash Bharadwaj, Mathieu Luisier, Lukas Novotny
Publication date
2019/9/12
Journal
Nano letters
Volume
19
Issue
10
Pages
6914-6923
Publisher
American Chemical Society
Description
Integration of electrical contacts into van der Waals (vdW) heterostructures is critical for realizing electronic and optoelectronic functionalities. However, to date no scalable methodology for gaining electrical access to buried monolayer two-dimensional (2D) semiconductors exists. Here we report viable edge contact formation to hexagonal boron nitride (hBN) encapsulated monolayer MoS2. By combining reactive ion etching, in situ Ar+ sputtering and annealing, we achieve a relatively low edge contact resistance, high mobility (up to ∼30 cm2 V–1 s–1) and high on-current density (>50 μA/μm at VDS = 3V), comparable to top contacts. Furthermore, the atomically smooth hBN environment also preserves the intrinsic MoS2 channel quality during fabrication, leading to a steep subthreshold swing of 116 mV/dec with a negligible hysteresis. Hence, edge contacts are highly promising for large-scale practical …
Total citations
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Scholar articles
A Jain, Á Szabó, M Parzefall, E Bonvin, T Taniguchi… - Nano letters, 2019