Authors
Serap Aksu, Ahmet A Yanik, Ronen Adato, Alp Artar, Min Huang, Hatice Altug
Publication date
2011/5/13
Conference
Micro-and Nanotechnology Sensors, Systems, and Applications III
Volume
8031
Pages
778-782
Publisher
SPIE
Description
We demonstrate a novel fabrication approach for high-throughput fabrication of engineered infrared plasmonic nanorod antenna arrays with Nanostencil Lithography (NSL). NSL technique, relying on deposition of materials through a shadow mask, offers the flexibility and the resolution to fabricate radiatively engineer nanoantenna arrays for excitation of collective plasmonic resonances. Overlapping these collective plasmonic resonances with molecular specific absorption bands can enable ultrasensitive vibrational spectroscopy. First, nanorod antenna arrays fabricated using NSL are investigated using SEM and optical spectroscopy, and compared against the nanorods with the same dimensions fabricated using EBL. No irregularities on the periodicity or the physical dimensions are detected for NSL fabricated nanorods. We also confirmed that the antenna arrays fabricated by NSL shows high optical quality …
Total citations
2013201420152016201720182019202022
Scholar articles
S Aksu, AA Yanik, R Adato, A Artar, M Huang, H Altug - Micro-and Nanotechnology Sensors, Systems, and …, 2011