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Electron? eld emission devices (cold cathodes), vacuum microelectronic devices and? eld emission displays Which incorporate cold cathodes and methods of making and using same. More speci? cally, cold cathode devices comprising electron emitting structures groWn directly onto a substrate material. The invention also relates to patterned precursor substrates for use in fabricating? eld emission devices and methods of making same and also to catalytically groWing other electronic structures, such as? lms, cones, cylinders, pyramids or the like, directly onto substrates.